| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor apparatus changing a standard variety at suitable timing in a production line of various products. <P>SOLUTION: In the production line of various semiconductor apparatuses, trend data of a standard variety and data of differences between varieties are made. When one variety to be produced next is a standard variety, trend data is used as its is, and when the variety to be produced next is different from the standard variety, an estimate of processing is obtained by correcting the trend data by using the data of differences between the varieties, optimal processing conditions are decided based on the estimate, and processing is carried out under the decided processing conditions. Thereafter, process data is obtained by measurement after processing. When the variety to be produced is the standard variety, the process data is used as it is, and when the variety to be produced is different from the standard variety, trend data corresponding to the standard variety is made by applying correction of differences between the varieties to the process data, and then the processing schedules of the varieties are arranged serially, thereby deciding the standard variety. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
