| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar motor wherein when a moving element is levitated, its influence on a load can be reduced. SOLUTION: The planar motor includes: a stator; the moving element disposed opposite to the stator; and a levitating device that levitates the moving element by jetting fluid to between the moving element and the stator. The motor is provided with: a load mounting base provided on one side of the moving element; and a connecting portion that connects a predetermined position of the central portion or peripheral portion of the one side of the moving element with the load mounting base. COPYRIGHT: (C)2009,JPO&INPIT
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