| 摘要 |
PROBLEM TO BE SOLVED: To selectively detect a secondary electron signal and a reflected electron signal regarding a secondary electron-reflected electron detecting device and a scanning electron microscope having the secondary electron-reflected electron detecting device. SOLUTION: This is a secondary electron-reflected electron detecting device which detects secondary electrons or reflected electrons generated from a test piece of an electron microscope and includes a secondary electron detecting part 30 which is composed of a corona ring 31, a scintillator 32 to receive the secondary electrons, and a light pipe 33, a reflected electron detecting part 20 which is composed of a scintillator to receive the reflected electrons and a light guide 21 which guides generated light from the scintillator and has a prescribed length, a jointing part 34 to joint the light guide 21 and the light pipe 33, and a photomultiplier 35 which receives light from any of the scintillators that have received secondary electrons or reflected electrons. COPYRIGHT: (C)2009,JPO&INPIT |
