| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum suction nozzle assembly, a receptacle of a flange and a vacuum suction nozzle of which can be bonded together, and which can prevent that the charged vacuum suction nozzle blows away an electronic component to be vacuum-adsorbed and static electricity is rapidly discharged from the vacuum suction nozzle, to cause discharge breakdown of ambient components. <P>SOLUTION: In a vacuum suction nozzle assembly 7; a vacuum suction nozzle 1 made of ceramics has a suction surface 2 on the top end; the back end of the vacuum suction nozzle 1 is bonded to a receptacle 11 of a flange 10; a bonding section of the vacuum suction nozzle 1 and the flange 10 includes a part to which a toasted skin surface 8 made of ceramics is bonded and a part to which a ground surface is bonded; and a resistance of the vacuum suction nozzle assembly 7 is 10<SP>3</SP>to 10<SP>11</SP>Ω. This provides a strong bond to the bonding section, and can prevent the electronic component from being blown away and being broken by static electricity. <P>COPYRIGHT: (C)2009,JPO&INPIT |
