| 摘要 |
Provided is a piezo-resistor type acceleration sensor in which an offset voltage does not fluctuate even when excessive impact/acceleration is applied. In the acceleration sensor, metal wires on top surfaces of a flexible portion and a weight are arranged in grooves formed on the flexible portion top surface/weight top surface. The acceleration sensor has a structure in which the metal wires do not hit an upper regulation plate even when the weight collides with the upper regulation plate, and the offset voltage fluctuation can be avoided.
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