| 摘要 |
<p>A method of producing a thin film magnetic head is provided to detect a thin film magnetic head in which a smear is generated on a row bar after a machine polishing process. A method of producing a thin film magnetic head comprises the following steps. Thin film magnetic heads(1) with reproduction heads and ELG(Electric Lap Guide) elements adjacent to the thin film magnetic head are arranged to form a row bar(10). A resistance of a magnetic resistance effect type element unit(30) of the ELG element is measured as the first resistance value. A resistance of a magnetic resistance effect type element unit of the thin film magnetic head is measured as the second resistance value. It is determined whether a smear is generated on a floating surface of the thin film magnetic head by using a difference between the first and second resistance values. A smear is removed only for the thin film magnetic head with the smear. The smear is removed by polishing only the thin film magnetic head with the smear. Only the thin film magnetic head with the smear is etched by using an ion beam to remove a smear. After the smear is removed, the entire first surface of the row bar including the floating surface of the thin film magnetic head is etched by using an ion beam.</p> |
