| 摘要 |
FIELD: physics; conductors. ^ SUBSTANCE: invention relates to electronic engineering and can be used in production of thin-film hybrid and monolithic integrated circuits when making thin-film capacitors. According to the invention, the film capacitor contains first and second plates made in form of metal films, a dielectric placed between the plates, terminals, which are part of the metal films overhanging end surfaces of the dielectric. There is a second dielectric layer and an intermediate metal plate between dielectric layers, which consists of insulated fragments. ^ EFFECT: increased yield ratio of capacitors due to reduced effect of defects on the dielectric film. ^ 2 dwg |
