| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a welding apparatus in which occurrence of weld defects by laser welding is suppressed. <P>SOLUTION: The laser beam machining apparatus includes a controller 52 which, in the event a pressure in a second vacuum chamber 30 is at a first prescribed value or below, with a workpiece W conveyed in a first vacuum chamber 10 by a workpiece changer 13, closes a transporting port 11 by a shutter 12 and also controls to release a first gate valve 22 and which, with the pressure in the first vacuum chamber 10 at a second prescribed value or below, controls a laser beam oscillator 51 so that a laser beam L is emitted to the workpiece W from a machining head 14. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
