| 摘要 |
PROBLEM TO BE SOLVED: To provide a spherical shape measuring device and a spherical shape measurement method capable of measuring a spherical shape with high accuracy, in a noncontact state. SOLUTION: A measuring object 1, having a spherical shape part 1a on one end of a shaft part 1b, is rotated about the center axis of the shaft part 1b by a measuring object support means 10. A noncontact displacement gauge 31 for measuring the surface position of the spherical shape part 1a in the noncontact state is rotated, in a plane containing the turning center axis of the shaft part 1b about a prescribed position of the center axis by a displacement gauge turning means 32. A shaft direction position of the noncontact displacement gauge 31 is adjusted by a shaft direction position adjusting means 41. As a result, the spherical shape of the spherical shape part 1a is measured, by making the noncontact displacement gauge 31 rotate about the center of the spherical shape part 1a, in a plane containing the center axis of the shaft part 1b, while making the measuring object 1 turn. COPYRIGHT: (C)2009,JPO&INPIT |
