| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device which does not cause short-circuit even if subjected to plasma etching. SOLUTION: The piezoelectric device includes a container having a recessed space formed with a board and a frame having a sealing conductor pattern, a piezoelectric vibrating element carrying pad and a first wiring pattern which are integrally formed into a lamination composed of a first metal layer and a second metal layer and are disposed on a base exposed in the recessed space, a piezoelectric vibrating element mounted on the piezoelectric vibrating element carrying pad, and a lid which is joined to the sealing conductive pattern formed on the frame of the container to airtightly seal the recessed space. The second metal layer in the piezoelectric vibrating element carrying pad and first wiring pattern has a thickness of 0.3 μm to 0.5 μm. COPYRIGHT: (C)2009,JPO&INPIT
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