WAFER TRANSPORT SYSTEM AND WAFER STORAGE CASSETTE

摘要

PROBLEM TO BE SOLVED: To provide a wafer transport system and a wafer storage cassette such that the state of a wafer in the cassette is speedily known. SOLUTION: The wafer transport system is so configured that the cassette which contains a plurality of wafers includes a radio tag equipped with a readable/writable memory, a sensor which detects whether the cassette contains the wafers is powered on when the cassette is installed in a wafer transport device to write information on whether the wafers are contained in the radio tag, and a reader provided to the wafer transport device reads out the information regarding the wafers stored in the memory of the radio tag to take the wafers out of the cassette by a transport arm. COPYRIGHT: (C)2009,JPO&INPIT