| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope having an objective lens capable of high resolution observation at a low acceleration voltage in which a high resolution observation can be made even at a high acceleration voltage. SOLUTION: The scanning electron microscope in which an image of a test piece is obtained by a secondary signal generated by irradiating electron beams on the test piece is provided with a high voltage control power source to impress an acceleration voltage between a negative electrode and a second positive electrode of an electron source, an objective lens of lower magnetic pole opening type having a thin portion, and an objective lens control power source which changes excitation intensity by changing current flowing in a coil of the objective lens. When an acceleration voltage higher than a predetermined acceleration voltage is impressed, the objective lens control power source increases current flowing in the coil of the objective lens. COPYRIGHT: (C)2009,JPO&INPIT
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