Dynamic measuring device for mapping stability of optical imaging system, has object structure, where lighting system is provided for generating electromagnetic radiation during operation of measuring device

摘要

The dynamic measuring device (10) has an object structure (18), where a lighting system (14) is provided for generating electromagnetic radiation (15) during operation of the measuring device. A recording medium (24) is provided, where the illuminated object structure is mapped by an optical imaging system (12) during the operation of the measuring device. Independent claims are included for the following: (1) an illumination system for microlithography; and (2) a dynamic measuring method for a mapping stability of an optical imaging system.