发明名称 APPARATUS FOR COATING ADHESIVE
摘要 An apparatus for coating an adhesive is provided to increase the productivity of a semiconductor package by arranging one stencil mask on at least two substrates and coating an adhesive on the surface of two substrate. In an apparatus for coating an adhesive, a stencil mask module(100) comprises a body and a first and a second stencil mask formed on a body. A substrate fixed module(200) comprises a first fix table and a second fixed table fixing the substrate. A location information supply module(300) provides location information of the substrates and the first and second stencil masks. The alignment module(400) comprises a first alignment unit and a second alignment unit arranging substrate.
申请公布号 KR20090096175(A) 申请公布日期 2009.09.10
申请号 KR20080021590 申请日期 2008.03.07
申请人 YU, DEOK SU;HYNIX SEMICONDUCTOR INC. 发明人 LEE, HWA SEOB;KOH, KWANG DUCK;LEE, JUM DONG;SHIN, JAE MOO;YU, DEOK SU;KIM, IL SU
分类号 H01L21/48 主分类号 H01L21/48
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