| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve processing efficiency of cross section processing, in a cross-section processing method, and to provide a device therefor. <P>SOLUTION: In this cross-section processing method, a fracture surface 1c is formed, by moving a fracture position through successive the application of removal processing on a sample 1, in order to observe a cross section of the sample 1 on an observation target cross section 2, or on an observation region which includes the observation target cross section 2. The method includes: a mark part forming process for forming mark parts 4A, 4B fracturable by the removal processing, where a fracture shape is discriminated in the fracture surface 1c, in a range where the fracture surface 1c is formed near the observation target cross section 2; a cross-section forming process for forming the fracture surface 1c, by applying the removal processing to the sample 1 and the mark parts 4A, 4B, in a range including the mark parts 4A, 4B formed in the mark part forming process; and an observation image acquisition process for acquiring an observation image of the cross section of the sample 1, during the formation or after formation by the cross-section forming process. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
