| 摘要 |
PROBLEM TO BE SOLVED: To ensure stable rotation of a rotor member 22 on a spin coater that grows in size in conjunction with multifunctionality, and further to achieve improved volumetric efficiency in a factory by shortening the length in the vertical direction of a spin coater 1. SOLUTION: At the outer peripheral side of a tubular fixing member 45, a stator member 21 that is composed by fixing a circularly-formed stator coil 28, is formed, and a body of rotation 41 is supported in a rotatable manner at the inner peripheral side of the stator member 21. At the lateral side of the body of rotation 41, many permanent magnets 29 surrounding the stator coil 28 are arranged in an approaching manner. In such a way, a rotor member 22 rotating together with the body of rotation 41 is formed. A flat and circular electric machine 20 (for example, electric motor) is formed by combining the stator member 21 and the rotor member 22. A substrate support member 23 is disposed on the top side of the body of rotation 41, and a pipe 35 is disposed to inject the process liquid 32 on the back side of a sheet-like material being processed (wafer 14) supported by the substrate support member 23. COPYRIGHT: (C)2009,JPO&INPIT |
