发明名称 Wafer translator having a silicon core isolated from signal paths by a ground plane
摘要 Apparatus and methods are provided for wafer translators having a silicon core, an isolating conductive ground plane, and copper and subjacent resin layers disposed on the ground plane. A silicon substrate having at least one major surface coated with an electrically conductive layer is subjected to a number of printed circuit board manufacturing operations including, but not limited to, application of resin-coated copper foils; mechanical grinding of copper layers; mechanical drilling of via openings in a dielectric material; plating of copper, nickel, and gold layers; laser removal of metal; and chemical removal of metal; in order to produce a wafer translator having a silicon core. In further aspects of the present invention, alignment marks are formed and contact structures, such as stud bumps, are placed relative to a local set of alignment marks.
申请公布号 US2009224372(A1) 申请公布日期 2009.09.10
申请号 US20080077670 申请日期 2008.03.20
申请人 ADVANCED INQUIRY SYSTEMS, INC. 发明人 JOHNSON MORGAN T.
分类号 H01L23/538;H01L21/768 主分类号 H01L23/538
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