CATADIOPTRIC PROJECTION OBJECTIVE WITH TILTED DEFLECTING MIRRORS, PROJECTION EXPOSURE APPARATUS, PROJECTION EXPOSURE METHOD, AND MIRROR

摘要

A catadioptric projection objective has a plurality of optical elements arranged along an optical axis to image a pattern arranged in an object surface of the projection objective onto an image surface of the projection objective. The optical elements include a concave mirror; a first deflecting mirror tilted relative to the optical axis by a first tilt angle ti about a first tilt axis to deflect light from the object surface towards the concave mirror or to deflect light from the concave mirror towards the image surface; and a second deflecting mirror tilted relative to the optical axis by a second tilt angle t.2 about a second tilt axis. The first deflecting mirror has a first reflective coating with reflectivity Rs1(α1) for s-polarized light and a reflectivity Rp1(α1) for p-polarized light incident on the first deflecting miror at first angles of incidenceαi from a first range of angles of incidence according to (t1-Δα1) <=α1 <= (t1+Δα-1). The second deflecting mirror has a second reflective coating with a reflectivity Rs2(α2) for s-polarized light and a reflectivity Rp2(α2) for p-polarized light incident on the second deflecting mirror at second angles of incidence 02 from a second range of angles of incidence according to (t2-Δα2) <=α2 <= (t2+Δα2). A first reflectivity sum, RSPE, for s-polarized light of polar edge rays accumulated upon reflection on the first and second deflecting mirrors is substantially equal to a second reflectivity sum, RPE for p-polarized light of equatorial edge rays accumulated upon reflection on the first and second deflecting mirrors.