发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A semiconductor device and a method for manufacturing the same are provided to facilitate patterning by forming a storage node contact mask as an island type instead of a line type. In a semiconductor device and a method for manufacturing the same, a semiconductor substrate(100) has a plurality of storage node contact areas. A first insulating layer(140) includes a groove(T) in which a part of it corresponding to each storage node contact area is perpendicularly penetrated. A second insulating layer(160) is arranged in the upper region of each groove. A conductive film(170) is formed so that the each groove is filled in, and a first insulating layer is made of the oxide film.
申请公布号 KR20090096169(A) 申请公布日期 2009.09.10
申请号 KR20080021584 申请日期 2008.03.07
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM, JONG IL
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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