发明名称 HOLDER OF SCANNING ELECTRON MICROSCOPE
摘要 A holder of scanning electron microscope is provided to measure sample by performing the perpendicula rotation of sample by the holder. The holder(110) of the scanning electron microscope comprises the body portion(120) comprised the body of holder the sample holding part and the supporting part(140) including holder clip(Clip) part(134), and the holder arm(Arm) part(132). The body portion is arranged in the lower portion of the scanning electron microscope. The body portion is fixed at the lower portion of the scanning electron microscope. The supporting part is arranged in the vertical direction which to the body portion. The inner side of the supporting part has the structure like a rail. The sample holding part is moved to the top of the inner side of the supporting part, the lower part, and the left side and right.
申请公布号 KR20090096167(A) 申请公布日期 2009.09.10
申请号 KR20080021582 申请日期 2008.03.07
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SHIN, GYU HEE
分类号 H01J37/20;H01J37/26 主分类号 H01J37/20
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