发明名称 LASER IRRADIATION DEVICE, AND FOCUS CONTROL METHOD AND TILT CONTROL METHOD OF THE LASER IRRADIATION DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a laser irradiation device etc., whose optical head unit is made lightweight. <P>SOLUTION: The laser irradiation device makes laser beams emitted by a plurality of laser light emission units incident on a light guide plate 13 through an optical fiber 2 to irradiate an irradiation object with a laser spot formed by converging a laser beam projected from the light guide plate 13 through an objective 16. The reflected laser beam reflected by the irradiation object is received by the light guide plate 13, the received reflected laser beam is guided to an AF optical system 30 from a return light fiber 5 connected to an end surface of the light guide plate 13, and the AF optical system 30 performs automatic focusing control using the reflected laser beam. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009206386(A) 申请公布日期 2009.09.10
申请号 JP20080049161 申请日期 2008.02.29
申请人 HITACHI COMPUTER PERIPHERALS CO LTD 发明人 KIMURA KATSUMI;SOGA KAZUHIRO;OGINO YOSHIAKI;IIDA YASUHIRO
分类号 H01L21/268;H01L21/20 主分类号 H01L21/268
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