发明名称 SAMPLE STAGE
摘要 PROBLEM TO BE SOLVED: To provide a test piece stage in which position fluctuations due to friction heat brought about by braking or the like is suppressed with a simple structure. SOLUTION: The test piece stage of one embodiment is provided with: a pressing part pressed by a pressing member; and a slided surface pressed by the pressing part. When the test piece stage stops, a part of the slided surface to which the pressing part contacts and/or a portion adjacent to the part, or the pressing part is controlled so as to be heated. Since a part of the slided surface or the like is heated, a temperature gradient is controlled. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009205938(A) 申请公布日期 2009.09.10
申请号 JP20080047031 申请日期 2008.02.28
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 FUJITA SHINJI
分类号 H01J37/20 主分类号 H01J37/20
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