| 摘要 |
A substrate processing apparatus which performs a predetermined process while returning a substrate in a state turning upward substrate to a horizontal direction is provided to perform the process of high precision by preventing vibration of a front end part and a rear end part. A first small stage(41), a second small stage(42) and a third small stage(43) are arranged along a substrate convey direction. The predetermined gas group is infra formed of the substrate. The substrate on the stage is maintained. A substrate convey unit(36) returns a substrate to the one-direction. A processing tool(37) is installed at the upper side of the second small stage. The processing tool performs the predetermined operation about the returned substrate. |
