| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a package for electronic component storage which includes a recess for electronic component storage penetrating a ceramic insulating layer, the package for electronic component storage suppressing a fall of a ceramic particle from a recess inner surface. <P>SOLUTION: The package 9 for electronic component storage includes, on an upper surface of an insulating base 1 formed by laminating a plurality of ceramic insulating layers 1a, the recess 2 for electronic component storage formed penetrating center portions of some of the ceramic insulating layers 1a along the thickness, the inner surface of the recess 2 being coated with a ceramic coating layer 3. The ceramic coating layer 3 suppresses a fall of a ceramic particle from the inner surface of the recess 2. Consequently, even when an electronic component 4 whose function is apt to be disturbed by sticking of the ceramic particle like a high-precision optical semiconductor element, an MEMS element, etc., is stored, reliability as an electronic device is easily enhanced. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
