发明名称 OPTICAL APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To more effectively limit the light incidence on a bonding agent for fixing an optical device. <P>SOLUTION: This optical apparatus includes: an optical device 2; a supporting member 3 which is connected to the optical device 2 by a bonding agent 1 and supports the optical device 2; and an incidence limit section 41 which limits the light incidence on the bonding agent 1. The supporting member 3 has a first support section 3a which is connected to at least a part of a side section 23 of the optical device 2 through the bonding agent 1, and a second support section 3b which supports the periphery of the optical device 2 from below. The incidence limit section 41 is arranged between a contact section of the bonding agent 2 and the first support section 3a, and a contact section 2a of the optical device 2 and the second support section 3b. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009206524(A) 申请公布日期 2009.09.10
申请号 JP20090142690 申请日期 2009.06.15
申请人 CANON INC 发明人 KAWANAMI KENTARO
分类号 H01L21/027;G02B5/00;G02B7/02;G03F7/20 主分类号 H01L21/027
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