HEAT TREATMENT METHOD USING INDUCTION HEATING, AND INDUCTION HEATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an induction heating device capable of improving efficiency of heat transfer from an induction heating coil to a treatment object member. SOLUTION: The induction heating device 10 for solving the above problem includes at least: a coil chamber 52 having induction heating coils 18 (18a-18f) allowing a cooling medium to be inserted in the insides thereof, and graphite 24 tightly fitted to the induction heating coils 18; and a process chamber 50 for arranging a wafer 30 used for a heating object. The induction heating device 10 is also provided with a separation plate 26 tightly fitted to the graphite 24, and separating the coil chamber 52 from the process chamber 50, and characterized in that the graphite 24 is pressed toward the induction heating coil 18 by the separation plate 26 by lowering gas pressure of the coil chamber 52 relative to that of the process chamber 50. COPYRIGHT: (C)2009,JPO&INPIT