摘要 |
PROBLEM TO BE SOLVED: To provide a magnetometric sensor capable of measuring both a high magnetic field and a low magnetic field simultaneously with a proper resolution, in a thin-film magnetometric sensor using a GMR film. SOLUTION: This thin-film magnetometric sensor is equipped with the GMR film having a giant magneto-resistance effect, and a thin-film yoke comprising a soft magnetic material connected electrically to both ends of the GMR film. The thin-film yoke is equipped with: a high-sensitivity part wherein a demagnetizing factor in the magnetosensitive direction is N<SB>L</SB>; and a low-sensitivity part connected electrically in series with the high-sensitivity part, wherein a demagnetizing factor in the magnetosensitive direction is N<SB>H</SB>(>N<SB>L</SB>). COPYRIGHT: (C)2009,JPO&INPIT
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