| 摘要 |
PROBLEM TO BE SOLVED: To provide a target for three-dimensional measurement capable of being collimated easily, and acquiring a compact constitution without damaging measurement accuracy of a center coordinate of a circular center domain part, even when being measured from an oblique direction. SOLUTION: This target 110 has a rectangular frame 110a; a small circle 110b surrounded by the rectangular frame 110a, and having the center on the same position as an intersection point Q of diagonals; a large circle 110c enclosed by the rectangular frame 110a, and enclosing the small circle 110b concentrically with the center of the small circle 110b. A reflection domain part between the rectangular frame 110a and the large circle 110c is a low-luminance reflection domain part 110d having the lowest reflectivity. A circular peripheral domain part between the large circle 110c and the small circle 110b is a high-luminance reflection domain part 110e having the highest reflectivity. A circular center domain part inside the small circle 110b is an intermediate-luminance reflection domain part 110f having an intermediate reflectivity between the reflectivity of the low-luminance reflection domain part 110d and the reflectivity of the high-luminance reflection domain part 110e. COPYRIGHT: (C)2009,JPO&INPIT
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