Method for processing object e.g. quartz substrate with miniaturized molybdenum structure, involves integrating detected interaction products of electron beam to form total signal to detect whether to continue or terminate process

摘要

The method involves feeding a reaction gas onto a surface of target object and directing an electron beam onto object surface to deposit or remove material with respect to object. The interaction products of electron beam with respect to the object, is detected to determine whether to continue or terminate the processing. The to-be-processed region on the object surface is subdivided into number of surface segments. The detected interaction products of electron beam are integrated to form a total signal for determining whether to continue or terminate the process.