| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a light emitting device capable of efficiently converging part of light emitted from a light emitting element on an optical detecting element. <P>SOLUTION: The manufacturing method of the light emitting device includes a first bonding step (Fig. 1(a)) of bonding a silicon substrate (first silicon substrate) 40a where the optical detecting element 4 is formed and a substrate 30 for light distribution, a resist layer forming step (Fig. 1(d)) of forming a resist layer 5 covering at least a part of one surface side of the silicon substrate 40a which faces an opening window 31 of the substrate 30 for light distribution, a light extraction window forming step (Fig. 1(f)) of forming a light extraction window 41 by performing dry etching from the other surface side of the silicon substrate 40a while using a resist mask layer 42, having an opening where a light extraction window 41 of the silicon substrate 40a is to be formed, as a mask and the resist layer 52 as an etching stopper layer, and a resist layer removing step (Fig. 1(g)) of removing the resist layer 52. <P>COPYRIGHT: (C)2009,JPO&INPIT |
