| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent flowing-in and sticking of contaminant on the rear surface side of a film by removing wrinkles of a film, in a laser patterning process with an SCAF type thin film solar battery film having a connection hole and an electric collecting hole that penetrate a substrate. <P>SOLUTION: In the method of manufacturing a thin film solar battery, a photoelectric conversion layer formed on the surface of a flexible substrate is laser-patterned. In a laser patterning step, a laser process stage 6 where a sucking hole 6a is formed in an end region contacting to both ends in width-direction of a film 2, is made to contact the opposite side of the laser process surface of the film 2, for sucking width-direction both ends W1 of the film 2 through the sucking hole 6a. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
