| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid coating apparatus and a liquid coating method which can disperse liquid widely with a lower applied voltage than ever. SOLUTION: The liquid coating apparatus 1 coating a coating object 2 with a liquid 9 includes: a mounting platform 3 mounting the coating object 2; a nozzle 4 disposed facing the coating object 2 mounted on the mounting platform 3 and ejecting the liquid 9 to the coating object 2; a first electrode 6 electrostatically charging the liquid 9 in the nozzle 4; a second annular electrode 7 disposed around the nozzle 4 which is to be a center axis; and a third electrode 8 fixed on the mounting platform 3 so as to apply electric potential to the coating object 2 wherein the electric potential is set so that a potential V2 of the second electrode 7 is between a potential V1 of the first electrode 6 and a potential V3 of the third electrode 8. COPYRIGHT: (C)2009,JPO&INPIT |
