摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress the decrease in ultraviolet transmission at wavelength of≤200 nm in a silica glass tube made of a synthetic quartz material ingot. <P>SOLUTION: The silica glass tube is formed by heating and processing the synthetic quartz material ingot at a temperature ranging from its softening point to 2,150°C, preferably at 1,800-2,150°C, more preferably at 1,900-2,150°C. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |