| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion irradiation device of long life, which can uniformly and efficiently apply ion irradiation treatment as a whole on an ion irradiation object part of an ion irradiation object workpiece. SOLUTION: An electron source 20A is provided so as to face the whole of the ion irradiation object part of a workpiece W, and filaments 2a, 2a', 2a" in the electron source 20A are distributed in parallel with each other in discontinuity in a plurality of steps over the whole electron source 20A. The filaments are arrayed in bending so that their pair parts close to each other in parallel or nearly in parallel are included toward each end part of the filaments for currents reverse to each other to flow, or, at least as to a pair of adjacent filaments, the pair parts consisting of parts parallel or nearly parallel with each other in adjacency for reverse currents to flow are included toward either end part of the filaments. Electron discharged from such an electron source is made collided with gas guided into the chamber 1 to have plasma generated, and ion in the plasma is radiated on the workpiece W. COPYRIGHT: (C)2009,JPO&INPIT
|
