| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm pump constituted to carry liquid by vibrations of a diaphragm, wherein a fluid can be carried at a flow rate close to a target carrier flow rate without causing the sticking of a check valve even when frequencies of a drive signal corresponding to a target carrier flow rate is deviated from frequencies offering a superior valve efficiency of a check valve. SOLUTION: A diaphragm pump mutually and periodically outputs as a drive signal output from a control unit a first drive signal set at a frequency f1 in proximity to a frequency in which the amplitude of a valve element of each check valve is made maximum at suction and discharge of the liquid and a second drive signal set at a frequency f2 different from the first frequency f1 of the first drive signal. By so doing, the pump can be driven without causing the sticking of the check valve. By adequately setting the frequency f2 of the second drive signal, at that time, a carrier flow rate of liquid can be made substantially coincident with a target carrier flow rate. COPYRIGHT: (C)2009,JPO&INPIT
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