发明名称
摘要 A method for dynamically registering multiple patterned layers on a substrate ( 3 ) comprises: depositing a first layer on the substrate; printing a first pattern ( 20 ) on the first layer; depositing a second layer on the first pattern; and printing a second pattern on the second layer while dynamically detecting the first pattern to align the second pattern with the first pattern.
申请公布号 JP2009532863(A) 申请公布日期 2009.09.10
申请号 JP20090502841 申请日期 2007.03.16
申请人 发明人
分类号 H01L21/027;G03F9/00 主分类号 H01L21/027
代理机构 代理人
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