| 摘要 |
PROBLEM TO BE SOLVED: To provide a differential pressure flowmeter which stably measures microflow rates by using the flow of a fluid with a small Reynolds number. SOLUTION: The flowmeter includes: a differential pressure generating section 5 which forms the flow of the fluid with a small Reynolds number, and at the same time, gives a resistance to the flow of the fluid; pressure sensors 3, 4 which measure the pressure difference (P<SB>1</SB>-P<SB>2</SB>) between both ends of the differential pressure generating section 5; and temperature adjusting sections 2A-2D, 6, H<SB>1</SB>, H<SB>2</SB>, T which keep the temperature T of the fluid F flowing through the differential pressure generating section 5 constant. COPYRIGHT: (C)2009,JPO&INPIT
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