| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously take images of a plurality of measurement points 2a, 2a by a plurality of cameras 9A, 9B without individually moving the cameras 9A, 9B entirely even if the plurality of measurement points 2a, 2b are inclined and deviate from normal positions. SOLUTION: When the two left/right measurement points 2a, 2b cannot be imaged simultaneously by the two cameras 9A, 9B positioned along an X direction because the measurement points 2a, 2a on a substrate 2 are inclined, the objective lenses of the cameras 9A, 9B are shifted individually in a Y direction to keep the respective measurement points 2a, 2a in the visual field of the respective cameras 9A, 9B for imaging simultaneously, thus simplifying the mechanism and reducing costs as compared with a case where the entire cameras are moved. COPYRIGHT: (C)2009,JPO&INPIT
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