摘要 |
First and second virtual grates are defined as respective sets of parallel virtual lines extending across a layout area in first and second perpendicular directions, respectively. The virtual lines of the first and second virtual grates correspond to placement locations for layout features in lower and higher chip levels, respectively. Each intersection point between virtual lines of the first and second virtual grates is a gridpoint within a vertical connection placement grid. Vertical connection structures are placed at a number of gridpoints within the vertical connection placement grid so as to provide electrical connectivity between layout features in the lower and higher chip levels. The vertical connection structures are placed so as to minimize a number of different spacing sizes between neighboring vertical connection structures across the vertical connection placement grid, while simultaneously minimizing to an extent possible layout area size. The vertical connection structures may be contacts or vias.
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