| 摘要 |
<p>A transfer arm cleaning device, a transfer arm cleaning method, a program and a computer-readable recording medium are provided to allow a user to clean a maintenance unit of the transfer arm efficiently by preventing a foreign material and a washing solution from being leaked. In a transfer arm cleaning device, a transfer arm cleaning method, a program and a computer-readable recording medium, a cleaning device(1) washes a maintenance unit of a transfer arm(10) having a plurality of the substrate maintenance units. An opening part is formed at one side of a treatment basin(20) so that it allows the access of the transfer arm, and a cleaning gas or the washing solution is discharged to the cleaning nozzle(40). A gas jet part(30) is installed at the opening of the treatment basin and discharges the gas.</p> |
