| 摘要 |
<p>Substrates are put on one hand and carried to exact positions. When substrates (16a, 16b) are carried from within a carrier chamber into a processing chamber, a first mounting portion (15a) of a hand (25) is located directly above a first processing position (8a) provided in the processing chamber, the substrate (16a) placed on the first mounting portion (15a) is raised, then the hand (25) is slightly moved, and a second mounting portion (15b) is located directly above a second position (8b). Then, the substrate (16b) on the second mounting portion (15b) is raised. When the hand (25) is pulled out from between the substrates (16a, 16b) and the first and second processing positions (8a, 8b) and the substrates (16a, 16b) are lowered, the substrates (16a, 16b) are exactly placed on the first and second processing positions (8a, 8b). When the substrates (16a, 16b) are placed on the hand (25) in a procedure reverse to the above, the substrates (16a, 16b) in the processing chamber can be exactly placed on the first and second mounting portions (15a, 16b) and carried out.</p> |
