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发明名称
LAYER PROCESSING
摘要
申请公布号
EP1123562(B1)
申请公布日期
2009.09.09
申请号
EP19990946329
申请日期
1999.09.13
申请人
VOCALCOMM GROUP, LLC
发明人
MARRS, ALAN, DOUGLAS;DANN, ALLISTER, WILLIAM, ELON;GLASPER, JOHN, LEWIS;PICKERING, CHRISTOPHER;ROBBINS, DAVID, JOHN;RUSSELL, JOHN
分类号
G01B11/06;H01L21/66;C30B25/16;G01N21/21;H01L21/302;H01L21/3065;H01L21/31
主分类号
G01B11/06
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代理人
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