发明名称 Ceramic pressure sensor
摘要 The sensor (10) has a carrier element (12) and a diaphragm (14), which are formed by ceramic tiles. The tiles lie on top of each other in an overlapping section with flat sides of the tiles, and limit a measuring chamber (28). The carrier element and the diaphragm are firmly connected together by a connection unit (16) e.g. glass solder, adhesive or suitable dielectric fluid. The connection unit sectionally limits the measuring chamber. The carrier element and the diaphragm are formed at a region of the chamber in a flat manner. The chamber comprises a protrusion at the carrier element. The diaphragm and the carrier element clamp down a trough-shaped sheet metal, which is sealed against the diaphragm by a plastic resin.
申请公布号 EP2098845(A1) 申请公布日期 2009.09.09
申请号 EP20080004325 申请日期 2008.03.08
申请人 HUBA CONTROL AG 发明人 HESS, JUERG;GRIMM, MIRKO
分类号 G01L9/00;G01L19/14 主分类号 G01L9/00
代理机构 代理人
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