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发明名称
TRANSFER OF A THIN LAYER FROM A WAFER COMPRISING A BUFFER LAYER
摘要
申请公布号
EP1535326(B1)
申请公布日期
2009.09.09
申请号
EP20030762848
申请日期
2003.07.09
申请人
S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
GHYSELEN, BRUNO;AULNETTE, CECILE;OSTERNAUD, BENEDITE;DAVAL, NICOLAS
分类号
H01L21/02;H01L21/762;H01L21/20;H01L27/12
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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