APPARATUS AND METHOD FOR APPLICATION AND SOLIDIFICATION OF A CHEMICAL LIQUID, AND RECORDING MEDIUM

摘要

A device for coating and solidifying a chemical solution, and its method are provided to reduce the installation space and the installation cost of a device and to improve the amount to be processed. A device(2) for coating and solidifying a chemical solution comprises a processing vessel(4) which has a gateway(10) in which the object to be processed is traded by an external returning implement(70); a loading stand(24) which is placed inside the processing vessel to load the object to be processed; a switch shutter part(12) which opens and closes the gateway; a coater(44) which is placed at the outer part of the gateway to coat the chemical solution on the surface of the object to be processed; and a solidifying unit(26) which is placed in the processing vessel to solidify the chemical solution coated on the surface of the object to be processed, thereby forming a thin film.