LOW POWER AND HIGH DENSITY PLASMA GENERATION APPARATUS, USING RADIO FREQUENCY

摘要

A low power using RF which easily diversifies plasma intensity in low power and a high density plasma generating device are provided to generate seed plasma of a state maintenance by controlling the space of ground electrode. A power pole(6) of a pillar shape is located from workpiece at predetermined interval. A dielectric(5) covers the circumference of the power pole. A secondary plasma earth bar(7) is arranged to close to side of the power pole. A gas inlet is formed between the power pole and supplementary plasma earth bar to provide the reaction gas. A power source controller controls the RF power applied to the power pole. A non-conductor(3) is arranged on the top of surrounding and supplementary plasma earth bar of dielectric. A ground bar(1) is arranged on the top of non-conductor. A metal case surrounds the supplementary plasma earth bar, and the upper side of the side of non-conductor and earth bar and earth bar.