| 摘要 |
<p>Provided is a flow rate sensor that can be miniaturized, that can ensure strength of the housing, and that can alleviate the stress applied on the substrate, and in which the number of components and the number of assembly steps are reduced. A fluid flow path (54) is formed in a base (43), and part of the upper surface of the fluid flow path (54) is opened to a substrate installing surface at the upper surface of the base (43). A circuit substrate (67) is arranged on the substrate installing surface by way of an angular seal member (57). A boss 59 and a boss 61 are horizontally projected at the inner surface of the cover (42), and substrate holders (65, 66) for pushing the upper surface of the circuit substrate (67) are horizontally projected. A cover (42) is attached to the base (43) by press fitting the bosses (59, 61) into press-fit holes (60, 63) horizontally formed in the base (43), and the substrate holders (65, 66) push the circuit substrate (67) downward so as to crush the seal member (57).</p> |
