| 摘要 |
<p>A vibration suppression apparatus, an exposure apparatus, and a method of manufacturing device are provided to suppress vibration of a structure by including more than 4 actuators applying a force to the structure. In a vibration suppression apparatus, an exposure apparatus, and a method of manufacturing device, three first actuators and at least one second actuator supports by applying a vertical force to a structure. Detectors(3a~3c) senses one of a position and vibration at a reference of the structure, and a controller(50) controls a force applied to the structure by three first actuator based on the output of the detector. A second actuator controls the second actuator so that the power applied to the structure is maintained regularly.</p> |
