发明名称 CANISTER
摘要 A canister is provided to accurately measure an amount of compound inside a canister by horizontally moving a shifting jig. A vessel main body(10) stores a chemical material. A sensor insertion groove(20) is formed in a bottom side of the vessel main body. A sensor part is inserted to the sensor insertion groove. The sensor part(30) includes a sensor loading jig, a moving jig, and a moving unit. A sensor loading groove is formed on a top surface of the sensor loading jig(32). The moving jig(36) moves the sensor loading jig. The moving unit(38) moves the moving jig about the sensor loading jig.
申请公布号 KR20090095074(A) 申请公布日期 2009.09.09
申请号 KR20080020157 申请日期 2008.03.04
申请人 MECHARONICS CO., LTD. 发明人 KIM, HYUN CHANG;KIM, HYOUNG MIN;JANG, HYUK KYOO
分类号 H01L21/02;H01L21/205 主分类号 H01L21/02
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