发明名称 Semiconductor device
摘要 An electronic component for microwave transmission includes a high resistivity substrate on which is at least located several metallization layers divided into portions. A first set of piled up portions defines a ground ribbon and a second set of piled up portions defines a power ribbon. At least a first active portion of said ground ribbon and a first active portion of said power ribbon are respectively located between the substrate and an uppermost one of the several metallization layers. The electronic component in one implementation is a coplanar waveguide.
申请公布号 US7586195(B2) 申请公布日期 2009.09.08
申请号 US20060541960 申请日期 2006.10.02
申请人 发明人
分类号 H01L23/48 主分类号 H01L23/48
代理机构 代理人
主权项
地址